Method and apparatus for separating composite member using...

Details Method and apparatus for separating composite member using... Method and apparatus for separating composite member using...

H - Electricity

01

L

H01L 21/68 (2006.01) H01L 21/00 (2006.01) H01L 21/02 (2006.01) H01L 21/683 (2006.01)

Patent

CA 2233127

To separate a composite member consisting of a plurality of bonded members without destructing or damaging it, a fluid is jetted against the composite member from a nozzle to separate it into a plurality of members at a position different from a bonding position.

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