Method and apparatus for stabilizing of the glow plasma...

Details Method and apparatus for stabilizing of the glow plasma... Method and apparatus for stabilizing of the glow plasma...

H - Electricity

01

J

H01J 17/00 (2006.01) H01J 17/49 (2006.01)

Patent

CA 2505267

A method and apparatus for stabilizing glow plasma discharges by suppressing the transition from glow-to-arc includes a perforated dielectric plate having an upper surface and a lower surface and a plurality of holes extending therethrough. The perforated dielectric plate is positioned over the cathode. Each of the holes acts as a separate active current limiting micro-channel that prevents the overall current density from increasing above the threshold for the glow-to-arc transition. This allows for a stable glow discharge to be maintained for a wide range of operating pressures (up to atmospheric pressures) and in a wide range of electric fields include DC and RF fields of varying strength.

L'invention concerne un procédé et un dispositif destinés à stabiliser des décharges luminescentes de plasma par suppression de la transition du régime d'effluve au régime d'arc, et faisant appel à une plaque diélectrique comportant une surface supérieure et une surface inférieure ainsi qu'une pluralité de trous la traversant. Cette plaque diélectrique est disposée sur la cathode. Chacun des trous fait office de microcanal de limitation de courant actif séparé empêchant la densité de courant d'ensemble de dépasser le seuil pour la transition du régime d'effluve au régime d'arc. Cela permet de stabiliser la décharge luminescente pour un large éventail de pressions de fonctionnement (jusqu'aux pressions atmosphériques) et dans une large plage de champs électriques, y compris les champs CC et RF d'intensité variable.

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