Method and apparatus for testing surface roughness

Details Method and apparatus for testing surface roughness Method and apparatus for testing surface roughness

G - Physics

01

B

73/57

G01B 11/30 (2006.01)

Patent

CA 1129228

ABSTRACT Surface roughness is tested by an optical probing method which involves scanning a beam of light from a laser over a specimen workpiece via a semi-reflecting mirror and a cylindrical lens and detecting the specular component of the light reflected back through the lens and the semi-reflecting mirror to a photomultiplier the output from which is fed to an electronic processor circuit which derive a numerical valve representing the mean intensity of the reflected radiation. A workpiece to be tested is then substituted for the specimen workpiece and a new numerical valve derived. The two numerical values are compared, as by division or subtraction to obtain an out- put signal representing the relative surface roughness of the workpiece under test with respect to that of the specimen. - 1 -

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