Method and apparatus for the controlled oxidation of materials

Details Method and apparatus for the controlled oxidation of materials Method and apparatus for the controlled oxidation of materials

C - Chemistry, Metallurgy

30

B

C30B 33/00 (2006.01) B01J 3/00 (2006.01) B01J 15/00 (2006.01) B01J 19/00 (2006.01) H01L 21/316 (2006.01) H01S 5/30 (2006.01) H01S 5/183 (2006.01) H01S 5/22 (2006.01)

Patent

CA 2324689

A method of carrying out the controlled oxidation of A material, such as Al(Ga)As is oxidised in a controlled manner placing it in a reactor, and causing a carrier gas containing an oxidising vapour, such as water, at a controlled partial pressure to flow over the oxidisable material. In this way, the reaction process can be made sensitive to only one variable.

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