C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 16/52 (2006.01) C23C 14/54 (2006.01) C23C 14/56 (2006.01)
Patent
CA 2214546
A method is described for depositing a complex optical multilayer coating on a substrate. The coating consists of multiple layers of at least two material types. The layers are sequentially deposited in a deposition chamber by reactive deposition; preferably sputtering, and the thickness of the deposited layers is determined one or more times during the layer deposition by taking optical measurements of the deposited layer and fitting theoretical values derived from a model of the deposited layers to the corresponding actual values obtained from said measurements. A process variable is continually controlled to ensure homogeneity of the deposited layers so that a valid thickness determination can be made from said theoretical model.
Akiyama Takayuki
Clarke Glenn A.
Dobrowolski Jerzy A.
Ito Takashi
Sullivan Brian Thomas
Marks & Clerk
National Research Council Of Canada
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