Method and apparatus for thin film deposition on a substrate

Details Method and apparatus for thin film deposition on a substrate Method and apparatus for thin film deposition on a substrate

H - Electricity

01

J

204/96.09, 204/1

H01J 37/34 (2006.01) C23C 14/34 (2006.01) C23C 14/54 (2006.01) C23C 14/56 (2006.01)

Patent

CA 1018475

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