C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 14/22 (2006.01) B81C 1/00 (2006.01) C23C 14/04 (2006.01) C23C 14/50 (2006.01) C23C 14/56 (2006.01) H01L 21/20 (2006.01)
Patent
CA 2261425
A fixture apparatus for material deposition or processing on a long, flexible, nonplanar, filamentary substrate has a tubular member for holding the filamentary substrate rotatably disposed on a base. An opening is formed in the tubular member through which material is deposited on the surface of the filamentary substrate. Moveable tubes are each slidingly disposed in the tubular member on either side of the opening. The tubes and/or the tubular member hold the filamentary substrate on both sides of a deposition area on the substrate to maintain the straight configuration of the long, flexible, filamentary substrate. The tubes and/or tubular member also physically masks the filamentary substrate to prevent material deposition outside the deposition area on the substrate. The base has a circular path and a rotating member. A wheel is coupled to one side of the tubular member and is rotatably disposed on the circular path of the base. The other side of the tubular member is rotatable coupled to the rotating member of the base by a bearing. The rotating member causes the wheel to turn about a vertical axis in a circular path. The wheel is fixed to the tubular member causing the tubular member to rotate about a horizontal axis or longitudinal axis of the tubular member. As the rotating member turns and the wheel rolls, the tubular member the filamentary substrate is rotated about the two different axes to uniformly deposit material on the filament.
Jacobsen Stephen C.
Mcneely Michael R.
Wells David L.
Sarcos Inc.
Smart & Biggar
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