Method and apparatus for two-wavelength interferometry...

G - Physics – 01 – B

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G01B 9/02 (2006.01) G01J 9/04 (2006.01) G01J 9/02 (2006.01)

Patent

CA 1302076

A B S T R A C T The apparatus comprises a laser means for the frequency n1 and the frequency n2 , in each case one polarizing beam splitter for producing cross-polarized partial beams of frequency n1 or n2 , in each case one modulator for displacing the frequency of in each case one of the partial beams by frequency f1 or f2, in each case a pair of deflecting mirrors and in each case a polarizing beam splitter for combining the partial beam n1, n1+f1, n2, n2+f2; two photodetectors , upstream of each of which is arranged a polarizer , a Michelson interferometer, a non- polarizing beam splitter for splitting the partial beams into in each case a measuring light beam or a reference light beam . The reference light beam passes to the associated photodetector . The measuring light beam passes into the Michelson interferometer and then to the associated photodetector . The signals of the photodetectors are demodulated according to the amplitude and the phase difference between the two demodulated signals is determined. This phase difference is only dependent on the position of the measurement object and the equivalent wavelength of the difference n1-n2. For stabilization or correction purposes, the apparatus can be duplicated and one of the constructions can be used as a reference. The corresponding method is given and is used for determining positions or distances as a spacing between two positions. Uncertainties can be removed by covering the distance or changing the frequency accompanied by simultaneous integration of the phase difference over time.

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