B - Operations – Transporting – 01 – D
Patent
B - Operations, Transporting
01
D
B01D 1/22 (2006.01) B01D 1/00 (2006.01) B01J 4/00 (2006.01) C03B 37/014 (2006.01) C23C 16/448 (2006.01)
Patent
CA 2132885
Disclosed is a method and apparatus for providing reactant vapors to a utilization site. The apparatus includes a vaporization chamber enclosed by top and bottom walls, side walls and first and second end walls. The first end wall is elevated with respect to the second end wall. The reactant is supplied in liquid form to a flow distributor that delivers the liquid to that portion of the bottom wall near the first end wall. The angle with which the bottom wall is inclined with respect to horizontal is sufficient to cause the liquid to flow down the bottom wall at a rate sufficient to form a film, the thickness of which is smaller than that thickness which would support a bubble during heating of the film. The surface is heated to a temperature greater than the boiling point of the liquid, thereby converting the liquid reactant to a vapor that is delivered to the vapor utilization site.
Cain Michael B.
Dobbins Michael S.
Corning Incorporated
Gowling Lafleur Henderson Llp
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