H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 31/0232 (2006.01) G02B 5/08 (2006.01) G02B 6/12 (2006.01) G02B 6/122 (2006.01) G02B 6/42 (2006.01) G02F 1/19 (2006.01) H01L 31/18 (2006.01)
Patent
CA 2130738
- 21 - METHOD AND ARRANGEMENT FOR ARBITRARY ANGLE MIRRORS IN SUBSTRATES FOR US IN HYBRID OPTICAL SYSTEMS Abstract A method for forming, and an arrangement for using arbitrary angle mirrors in substrates is disclosed. An erodible material, such as a photoresist, is applied to a substrate at a site and is exposed to radiation at that site which has a linear variation in energy at the surface of the erodible material. Due to this variation in exposure energy, a taper results in the erodible material after development. The tapered region is then etched in a manner which etches both the erodible layer and the underlying substrate. The taper in the erodible layer provides a varying attenuation during the etching process such that the taper of the erodible layer, or a multiple of it, is transferred to the substrate. In a first embodiment, a tapered reflective surface is formed in a substrate, which surface engages an optical signal and deflects it to an optical device or another surface. In a second embodiment, two tapered reflective surfaces are formed in a substrate and oriented to deflect incident light to a modulation device. In a third embodiment, an arrangement for modulating a light signal is formed by two tapered reflective surfaces. The surfaces are oriented to form a vee groove in a substrate and are coated with an active semiconductor device.
Goossen Keith Wayne
Walker James Albert
American Telephone And Telegraph Company
Kirby Eades Gale Baker
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