Method and arrangement for mechanically moving of a magnetic...

Details Method and arrangement for mechanically moving of a magnetic... Method and arrangement for mechanically moving of a magnetic...

C - Chemistry, Metallurgy

23

C

313/167

C23C 14/32 (2006.01) H01J 37/32 (2006.01)

Patent

CA 1301239

A B S T R A C T Method and device for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device. To prevent grooves to occur on the cathode surface means are provided to add a further movement to the circular base movement of the magnetic field generating device by which substantially the whole surface area to be consumed is scanned by the arc spot.

561505

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