H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/683 (2006.01)
Patent
CA 2718290
The invention relates to a method for transporting flat transport goods, particularly substrates (3) such as silicon wafers and solar cells, on at least one conveyor belt (2) of a conveyor belt system (1), wherein the substrates (3) are held on a conveying surface (5) of the conveyor belt (2) at least in some cycles during the transport by means of suction. In order to ensure improved slip-resistant and gentle transport of the substrates (3) on the conveyor belt (2), according to the invention along at least one of the two longitudinal edges (7) of the strap (8) of the conveyor belt (2) that extend in the transport direction, in a plurality of positions (9) spaced with respect to each other, underpressure that is based on the Bernoulli effect is generated by means of a guidance of a pressure medium (11), such as compressed air, that is controlled by a flow system (4), and, as a result of the pressure difference between the atmospheric pressure and the underpressure generated at the respective position (9) formed at the respective position (9) on the longitudinal edge of the belt, the substrates (3) are held with uniform pressure on the transport surface (5) of the conveyor belt (2) with the contact surface.
L'invention concerne un procédé de transport de produits plats, en particulier de substrats (3) tels que des tranches de silicium et des cellules solaires, sur au moins une bande transporteuse (2) d'un système à bande transporteuse (1), procédé dans lequel les substrats (3), pendant le transport, sont maintenus par aspiration sur une surface de transport (5) de la bande transporteuse (2), au moins de manière cadencée. Afin d'assurer un transport amélioré, préservateur et sans glissement des substrats (3) sur la bande transporteuse (2), il est produit selon l'invention, le long d'au moins l'un des deux bords longitudinaux (7), orientés dans la direction du transport, de la courroie (8) formant la bande transporteuse (2), en une pluralité de positions (9) écartées les unes des autres, une dépression fondée sur l'effet Bernoulli obtenue en guidant dans un système d'écoulement (4) un fluide sous pression (11) tel que l'air, si bien que les substrats (3), du fait de la différence de pression produite dans les différentes positions (9) sur les bords longitudinaux de la courroie entre la pression atmosphérique et la dépression produite dans les différentes positions (9), sont maintenus appuyés sur la surface de transport (5) de la bande transporteuse (2) par leur surface d'appui.
Jonas & Redmann Automationstechnik Gmbh
Riches Mckenzie & Herbert Llp
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