C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 14/24 (2006.01)
Patent
CA 2476855
The invention relates to a method for coating a substrate with a layer of a material, such as a metal, in which a quantity of electrically conductive material is vaporized in a space with a low background pressure and energy is supplied to the material which is to be vaporized in order to vaporize this material. According to the invention, the material which is to be vaporized, while it is being vaporized, is kept floating, without support, in the space and is enclosed in an alternating electromagnetic field, the alternating electromagnetic field being generated with the aid of a high-frequency alternating current. The invention also relates to a device for coating a substrate and to a substrate.
L'invention concerne un procédé destiné à revêtir un substrat d'une couche de matériau, notamment du métal, dans laquelle une quantité de matériau électriquement conducteur est vaporisée dans un espace à faible niveau de pression et d'énergie et, ajoutée au matériau à vaporiser en vue de vaporiser ce matériau. Selon l'invention, le matériau à vaporiser, est maintenu flottant durant la vaporisation, sans support, dans l'espace et est enfermé dans un champ électromagnétique alternatif, ce champ électromagnétique étant généré à l'aide d'un courant alternatif haute fréquence. L'invention concerne également un dispositif destiné à revêtir un substrat et un substrat.
Gleijm Gerardus
Schade Van Westrum Johannes Alphonsus Franciscus
Corus Technology Bv
Ridout & Maybee Llp
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