Method and device for coating an inner surface of a hollow...

C - Chemistry – Metallurgy – 23 – C

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C23C 16/04 (2006.01)

Patent

CA 2645621

The invention relates to a method and a device for coating an inner surface of a hollow endless geometry, in particular of a pipe (2), wherein the technical problem of providing a method and a device for coating an inner surface of a hollow endless geometry, in particular of a pipe, which can be used for a greater variety of cross sections is solved by a method and a device in which a gas mixture comprising at least one precursor is introduced into the endless geometry, in which the endless geometry is passed through at least one electrode unit (6), in which an alternating electric voltage is applied to the electrode unit (6), in which the gas mixture inside the endless geometry is at least partially transformed into a plasma state in the region of the electrode unit (6), in which a reaction product is produced in the gas mixture from the precursor by the plasma and in which the reaction product is deposited on the inner surface of the endless geometry.

L'invention concerne un procédé et un dispositif d'enduction d'une surface interne d'une géométrie creuse et continue, notamment un tuyau (2), utilisables pour un large éventail de sections transversales, selon lequel un mélange gazeux contenant au moins un précurseur est introduit dans la géométrie continue, la géométrie continue est passée dans au moins une unité d'électrode (6), une tension électrique changeante est introduite dans l'unité d'électrode (6), le mélange gazeux au sein de la géométrie continue est, dans la zone de l'unité d'électrode (6), au moins en partie transféré dans un état plasma, un produit de réaction est produit par le plasma à partir du précurseur et le produit de réaction est isolé sur la surface intérieure de la géométrie continue.

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