Method and device for making a thin layer composite unimorph...

H - Electricity – 01 – L

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H01L 41/09 (2006.01) B32B 37/14 (2006.01) H01L 41/22 (2006.01) H01L 41/24 (2006.01)

Patent

CA 2217472

A method for forming ferroelectric wafers (10) is provided. A prestress layer (14) is placed on the desired mold. A ferroelectric wafer (12) is placed on top of the prestress layer. The layers are heated and then cooled, causing the ferroelectric wafer to become prestressed. The prestress layer may include reinforcing material and the ferroelectric wafer may include electrodes or electrode layers may be placed on either side of the ferroelectric layer. Wafers produced using this method have greatly improved output motion.

Procédé d'élaboration de plaquettes ferro-électriques (10). Une couche précontrainte (14) est appliquée sur le moule désiré. Une plaquette ferro-électrique (12) est appliquée sur la couche précontrainte. Ces couches sont ensuite chauffées puis refroidies, entraînant la pré-contrainte de la plaquette ferro-électrique. La couche pré-contrainte peut inclure un matériau de renfort et la plaquette ferro-électrique peut inclure des électrodes ou bien des couches électrodes peuvent être placées de part et d'autre de la couche ferro-électrique. Les plaquettes réalisées selon ce procédé présentent un déplacement mécanique résultant nettement amélioré.

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