Method and device for nano-imprinting

B - Operations – Transporting – 29 – C

Patent

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B29C 59/02 (2006.01) B81C 1/00 (2006.01) H01L 21/027 (2006.01)

Patent

CA 2611436

A nanoimprint system according to one embodiment of the present invention is a system for perfoming a pattern transfer onto an object to be molded by pressing a mold against the object to be molded using a head, chracterized in that the head has a flat pressing surface during pressing the mold and is slid onto the mold while pressing the mold.

Système de nano-impression pour transférer un motif à un objet à mouler en pressant un moule contre l~objet à mouler au moyen d~une tête. Ce système est caractérisé en ce que la tête a une face de pression plate au moment du pressage du moule et en ce que la tête glisse sur le moule lorsqu~elle presse le moule.

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