Method and device for non-destructive analysis of...

G - Physics – 01 – M

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Details

G01M 11/08 (2006.01) B05B 1/14 (2006.01) B23K 26/04 (2006.01) B23K 26/38 (2006.01) G01B 11/12 (2006.01) G01B 11/14 (2006.01)

Patent

CA 2535839

Method for fabricating and inspecting small holes in a material are disclosed. The method includes directing light onto the material and through the holes formed in the material, and then collecting the light passing through the holes in the material onto a detector. The methods further include analyzing the light for properties of the holes, and modifying the process based these detected properties.

La présente invention a trait à un procédé de fabrication et d'inspection de trous de petite dimension dans un matériau. Le procédé comprend l'orientation de la lumière sur le matériau et à travers les trous formés dans le matériau, suivie du captage de la lumière passant à travers les trous dans le matériau sur un détecteur. Les procédés comprennent en outre l'analyse de la lumière pour des propriétés des trous, et la modification du processus en fonction desdites propriétés détectées.

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