Method and device for producing plasma

Details Method and device for producing plasma Method and device for producing plasma

H - Electricity

05

H

H05H 1/30 (2006.01) H05H 1/34 (2006.01)

Patent

CA 2283410

The invention relates to a device for producing RF/HF induced low-energy plasma (17), in particular noble gas plasma, comprising a generator and a supply element for the plasma gas. The invention provides for the generator to be coupled in a known manner to two in particular ring- or disk-shaped parallel, interspaced electrodes (1), each having at least one through-opening, and for at least one isolator (2) to be positioned between said electrodes (1), said isolator having at least one particularly circular through-opening (3) assigned to the through-opening of said electrode, whose through-opening (3) is designed to confine said plasma (17) formed by a plasma gas at a pressure of at least 0.01 bars, but preferably between 0.1 and 5 bars. The inside diameter of the through-opening (4) of said electrodes (1) is at least double, but essentially approximately four to eight times that of the inside diameter of the through-opening (3) of said isolator (2) for confining said plasma (17).

L'invention concerne un dispositif pour produire un plasma (17), de faible énergie, induit par des radiofréquences/hautes fréquences, notamment un plasma à gaz noble, ledit dispositif comportant un générateur et une alimentation pour le gaz plasma. Selon l'invention, il est prévu que le générateur soit raccordé, de façon connue en soi, à deux électrodes (1), en particulier annulaires ou en forme de disque, placées parallèlement à distance l'une de l'autre, comportant chacune au moins une ouverture de passage. De plus, au moins un isolateur (2) est placé entre les électrodes (1) et comporte au moins une ouverture de passage, notamment en forme de disque, pour délimiter le plasma (17) formé par un gaz présentant une pression d'au moins 0,01 bar, de préférence de 0,1 à 5 bars. En outre, le diamètre intérieur de l'ouverture de passage (4) des électrodes (1) est au moins égal à deux fois, notamment quatre à huit fois, le diamètre intérieur de l'ouverture de passage (3) dans l'isolateur (2), servant à délimiter le plasma (17).

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