H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 31/18 (2006.01)
Patent
CA 2387510
The present invention relates to a method for producing a solar cell. Material is deposited on a multicrystalline silicon substrate. Passivation is carried out with hydrogen plasma. According to the invention, the material is deposited by means of low pressure CVD and the hydrogen passivation is carried out by supplying hydrogen plasma that is induced away from the partially processed solar cells. The invention also relates to a device for carrying out said method.
La présente invention concerne un procédé permettant de réaliser une pile solaire, selon lequel un matériau est déposé sur un substrat de silicium polycristallin qui est ensuite soumis à une passivation à l'aide d'un plasma hydrogéné. Il est proposé, selon l'invention, que ledit matériau soit déposé par dépôt chimique en phase vapeur basse pression et que la passivation par hydrogène se fasse par amenée d'un plasma hydrogéné induit à distance des piles solaires partiellement traitées. L'invention concerne également un dispositif pour la mise en oeuvre de ce procédé.
Fath Peter
Moller Rainer
Pernau Thomas
Reichart Johann-Georg
Spiegel Markus
Centrotherm Elektrische Anlagen Gmbh & Co.
Mccarthy Tetrault Llp
Universitat Konstanz
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