Method and device for testing electrical conductor elements

Details Method and device for testing electrical conductor elements Method and device for testing electrical conductor elements

G - Physics

01

R

324/45

G01R 31/02 (2006.01) G01R 31/28 (2006.01)

Patent

CA 1120545

i English, A.T. 5/6-14/19 Abstract of the Disclosure A method and a device implementing the method are disclosed for testing electrical conductor elements in the manufacture of integrated circuit devices. The method is based on determining nonlinearity of electrical resistance, a quantity which was found to be closely related to reliability of conductor elements. The method calls for applying a repetitive train of pulses to an AC-coupled linear network across whose output terminals the element being tested is placed. The resulting average current through or voltage across the element provides a measure of nonlinearity of resistance.

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