Method and device for treating substrates

Details Method and device for treating substrates Method and device for treating substrates

B - Operations, Transporting

05

C

B05C 11/08 (2006.01) G03F 7/16 (2006.01) H01L 21/00 (2006.01)

Patent

CA 2362798

For the uniform coating of a substrate (13) the invention provides for a device and a method for coating substrates by which the substrate is supported on a substrate holder (5) in such a way that a substrate surface (15) to be coated is bare and the substrate is turned with the substrate holder. The method and device are characterized in that a cover (20) can be fixed to the substrate holder and together with said substrate holder forms a closed chamber for the substrate.

L'invention concerne un procédé et un dispositif d'enduction de substrats visant à obtenir une enduction uniforme du substrat (13). Dans le dispositif selon l'invention, le substrat est fixé sur un support de substrat (5) de telle manière qu'une surface de substrat à enduire (15) est dégagée et que le substrat tourne avec le support de substrat. Le dispositif selon l'invention est caractérisé en ce qu'on peut fixer au support de substrat un couvercle (20) qui forme, avec le support de substrat, une chambre fermée pour le substrat.

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