F - Mech Eng,Light,Heat,Weapons – 16 – F
Patent
F - Mech Eng,Light,Heat,Weapons
16
F
F16F 15/02 (2006.01) G03F 7/20 (2006.01) G05D 19/02 (2006.01) H01L 21/00 (2006.01)
Patent
CA 2359225
A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electroactive material bonded to an electroded sheet.
La présente invention concerne un système antivibration comprenant un actionneur et un capteur destinés à éliminer des vibrations dans des systèmes de fabrication d'équipement électronique. L'actionneur peut comprendre un ou plusieurs plateaux ou éléments d'un matériau électroactif lié à une feuille électrode.
Bianchini Emanuele
Jacques Robert
Marsh Betsy
Pletner Baruch
Spangler Ronald
Active Control Experts Inc.
Cymer Inc.
Mbm Intellectual Property Law Llp
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