Method and measuring device for gauging surfaces

Details Method and measuring device for gauging surfaces Method and measuring device for gauging surfaces

G - Physics

01

B

G01B 11/00 (2006.01)

Patent

CA 2698961

In a method for gauging surfaces (7"), in which a frequency-modulated laser beam is generated, the laser beam is emitted onto the surface as measuring radiation (MS), the measuring radiation (MS) backscattered from the surface (7") is received and the distance between a reference point and the surface (7") is measured interferometrically, wherein the measuring radiation (MS) is emitted and received while the surface to be gauged is being scanned, and a measuring arm and a reference interferometer arm with a partially common beam path are used, deviations from the essentially perpendicular impingement of the measuring radiation (MS) on the surface (7") are taken into account algorithmically during distance measurement and/or are avoided or reduced during scanning by controlling the emission of the measuring radiation (MS)

L'invention concerne un procédé d'arpentage de surfaces (7``) comprenant la génération d'un faisceau laser à modulation de fréquence, l'émission du faisceau laser sous forme de rayonnement de mesure (MS) sur la surface, la réception du rayonnement de mesure (MS) rétrodiffusé par la surface (7``) et des télémétries interférométriques d'un point de référence par rapport à la surface (7``). Le rayonnement de mesure (MS) est émis et reçu pendant un guidage d'exploration sur la surface à arpenter et un bras d'interféromètre de mesure et de référence est utilisé avec une trajectoire de faisceau partiellement commune. Dans ce procédé, les écarts sont pris en compte de façon algorithmique par rapport à l'incidence essentiellement verticale du rayonnement de mesure (MS) sur la surface (7``) lors de la télémétrie, et/ou sont évités ou réduits lors du guidage d'exploration par commande de l'émission du rayonnement de mesure (MS).

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