Method and system for detection of thin metal layers in...

Details Method and system for detection of thin metal layers in... Method and system for detection of thin metal layers in...

G - Physics

01

R

343/2, 340/124.3

G01R 27/06 (2006.01) G01N 22/00 (2006.01) G07C 3/14 (2006.01)

Patent

CA 1121019

Abstract of the Disclosure Metal layers of extreme thinness, of the order of fifty Angstroms and greater are detected by use of microwave energy so propagated as to permit determination of the presence or absence of the metal in a detection zone of limited extent outwardly of the issuance location of such propagated energy. Apparatus is provided for propagating microwave energy having a characteristic which changes with propagation distance from a maximum value at the energy issuance location to a minimum value first exhibited at the outward end of the detection zone.

321590

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