Method and system for rapid measurement of small objects on...

Details Method and system for rapid measurement of small objects on... Method and system for rapid measurement of small objects on...

G - Physics

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G01B 11/00 (2006.01) G01B 11/02 (2006.01) G01B 11/24 (2006.01) G01B 11/25 (2006.01) G01N 21/88 (2006.01) G01N 21/95 (2006.01) G01R 31/309 (2006.01) G02B 21/22 (2006.01) H05K 13/08 (2006.01)

Patent

CA 2322189

A system including confocal and triangulation-based scanners provides dimensional information about microscopic targets. The targets are illuminated with a scanning beam of electromagnetic radiation such as laser light. A confocal detector is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem includes a detector placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, triangulation-based data is acquired in parallel or sequentially with at least one slice of confocal image data, there being sustantially perfect temporal and spatial registration between the two data channels.

Un système comprenant des scanners confocaux et basé sur une triangulation fournit des informations dimensionnelles relatives à des cibles microscopiques. Les cibles sont illuminées par un faisceau de balayage de rayonnement électromagnétique tel qu'une lumière laser. Un détecteur confocal est placé en un premier point afin de recevoir un rayonnement réfléchi lequel est sensiblement colinéaire optiquement avec le faisceau incident. Le système comprend un filtre spatial destiné à atténuer l'énergie de fond. Le sous-système basé sur une triangulation comprend un détecteur placé en un second point non-colinéaire par rapport au faisceau incident. Ce détecteur a un axe sensible à la position. Des données numériques sont reçues des signaux produits par les détecteurs. Ainsi, des données basées sur une triangulation sont acquises en parallèle ou de manière séquentielle avec au moins une tranche de données d'image confocale, un cadrage temporel et spatial sensiblement parfait existant entre les deux canaux de données.

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