Method, apparatus and system for verification of patterns

Details Method, apparatus and system for verification of patterns Method, apparatus and system for verification of patterns

G - Physics

06

T

G06T 7/00 (2006.01) B41F 33/00 (2006.01)

Patent

CA 2249265

A method, apparatus and system for verifying the establishment of a pattern includes means for storing a template of the pattern, means for acquiring an image of the established pattern, a first image processing means to alter at least one of said template and acquired images to produce at least two resultant images, comparison means to compare the two resultant images with the other of said template and acquired image and means to evaluate the results of each comparison to determine if the established pattern includes a defect. Both gray scale and binary processing and comparisons are disclosed for use as required.

Un procédé, un appareil et un système permettant de vérifier la constitution d'un motif comprennent des moyens permettant de mémoriser un gabarit du motif, des moyens permettant d'acquérir une image du motif constitué, un premier moyen de traitement d'image permettant de modifier au moins l'une des images du gabarit et des images acquises afin de produire au moins deux images résultantes, des moyens de comparaison afin de comparer les deux images résultantes avec l'autre des images du gabarit et des images acquises, et des moyens permettant d'évaluer les résultats de chaque comparaison afin de déterminer si le motif constitué contient un défaut. Sont décrits également l'échelle de gris, et le traitement et les comparaisons binaires tels qu'ils sont utilisés dans la présente invention.

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