Method for characterising a surface, and device therefor

Details Method for characterising a surface, and device therefor Method for characterising a surface, and device therefor

G - Physics

01

N

G01N 21/55 (2006.01) G01N 33/53 (2006.01) G01N 33/543 (2006.01)

Patent

CA 2431399

The invention concerns a method for characterising the surface of a sensitive layer deposited on the base of an optical prism, said surface comprising active zones whereof the optical thickness is capable of varying with time, said method using a technique based on analysis of the reflective variation of the prism-sensitive layer interface. The method consists in causing: a collimated light beam with an angle of incidence enabling total reflection on the prism base to penetrate into the prism, said beam illuminating a fixed part of the interface corresponding to the part to be characterised; scanning at an angle so as to locate an incidence whereon the reflectivity of the active zones is minimal; determining an angle of incidence optimal for sensitivity of detection of the active zones; adjusting the incidence to the optimal value; and measuring the reflectivity with an imaging system. The invention also concerns a device for implementing said method.

Procédé de caractérisation de la surface d'une couche sensible déposée sur la base d'un prisme optique, ladite surface comportant des zones actives dont l'épaisseur optique est susceptible de varier avec le temps, ledit procédé utilisant une technique fondée sur l'analyse de la variation de la réflectivité de l'interface prisme - couche sensible, dans lequel on fait entrer dans le prisme un faisceau lumineux collimaté avec un angle d'incidence permettant la réflexion totale sur la base du prisme, ledit faisceau éclairant une partie fixe de l'interface correspondant à une partie à caractériser, on effectue un balayage en angle de façon à repérer une incidence pour laquelle la réflectivité des zones actives est minimum, on détermine un angle d'incidence optimal pour la sensibilité de détection des zones actives, on règle l'incidence à la valeur optimale, et on mesure la réflectivité à l'aide d'un système d'imagerie; et dispositif pour mettre en oeuvre ce procédé.

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