Method for contactless capacitive thickness measurements

Details Method for contactless capacitive thickness measurements Method for contactless capacitive thickness measurements

G - Physics

01

B

G01B 7/06 (2006.01)

Patent

CA 2689060

A method for contactless capacitive thickness measurement of a flat material (10) that is placed in the fringe field (32) of a capacitor (C1, C2), with simultaneous measurement of the width L of an air gap (16) between the flat material and the capacitor plates, characterised in that the capacities gL, kL of two capacitors (C1, C2) are measured whose fringe fields (32) decay at different rates towards the flat material (10), and in that both, the thickness D of the flat material (10) and the width L of the air gap (16) are determined on the basis of the condition that, for each capacitor (C1, C2), the measured capacity gL, kL is equal to the integral of the capacity gradient g', k' over the thickness of the flat material (10).

L'invention concerne un procédé de mesure d'épaisseur capacitive sans contact d'un matériau plat (10) placé dans le champ de franges (32) d'un condensateur (C1, C2), en réalisant simultanément une mesure de la largeur L d'un entrefer (16) entre le matériau plat et les plaques du condensateur, caractérisé en ce que les capacités gL, kL des deux condensateurs (C1, C2), mesurées dans des champs de franges (32), décroissent à différentes vitesses dans le matériau plat (10), et en ce qu'à la fois l'épaisseur D du matériau plat (10) et la largeur L de l'entrefer (16) sont déterminées à condition que, pour chaque condensateur (C1, C2), la capacité mesurée gL, kL soit égale à l'intégrale du gradient de capacité g', k' par rapport à l'épaisseur du matériau plat (10).

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