Method for controlling gas in halogen gas laser and device...

Details Method for controlling gas in halogen gas laser and device... Method for controlling gas in halogen gas laser and device...

H - Electricity

01

S

345/36

H01S 3/036 (2006.01) H01S 3/225 (2006.01)

Patent

CA 2001035

ABSTRACT OF THE DISCLOSURE A gas control device in a halogen gas laser device which comprises: a filter for receiving a small quantity of deteriorated gas from the upstream portion of the laser gas circulating path to convert it into a low-boiling-point gas; and a gas detector for measuring the density of the low-boiling-point gas thus formed, to estimate the halogen gas density, and outputting, when the density is lower than a predetermined value, an instruction signal to supply halogen gas.

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