Method for creating and keeping a controlled atmosphere in a...

Details Method for creating and keeping a controlled atmosphere in a... Method for creating and keeping a controlled atmosphere in a...

H - Electricity

01

J

H01J 9/00 (2006.01) H01J 7/18 (2006.01) H01J 29/94 (2006.01)

Patent

CA 2169364

There is described a method for creating and keeping a controlled atmosphere in a FED, essentially free of oxidizing gases and including hydrogen at a pressure comprised between 10-7 and 10-3 mbar, which comprises the step of arranging inside the FED, before it is frit sealed, a getter material previously charged with hydrogen gas. Subsequently, the two parts forming the FED are frit sealed along their perimeter and the FED itself is evacuated during this operation or later, through a suitably arranged tail, which is hermetically closed after being evacuated through a "tip-off". The getter material is charged by exposing it to hydrogen gas at a pressure comprised between 10-4 and 2 bar.

Procédé permettant de créer et d'entretenir une atmosphère contrôlée dans un dispositif à émission de champ, cette atmosphère étant essentiellement exempte de gaz oxydants et comprenant de l'hydrogène sous une pression comprise entre 10?-7¿ et 10?-3¿ mbar. Le procédé consiste à placer dans le dispositif à émission de champ, avant le scellement de celui-ci par soudage à la fritte, un produit dégazeur préalablement chargé d'hydrogène gazeux, puis à sceller le dispositif à émission de champ par soudage à la fritte des périphéries des deux pièces formant celui-ci, et à évacuer ledit dispositif, pendant ou après cette opération, à travers un tuyau prévu à cet effet qui est à son tour scellé hermétiquement par compression à chaud après l'évacuation. Le chargement du produit dégazeur se fait par mise en contact avec de l'hydrogène gazeux sous une pression comprise entre 10?-4¿ et 2 bar.

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