Method for depositing another thin film on an oxide thin...

Details Method for depositing another thin film on an oxide thin... Method for depositing another thin film on an oxide thin...

H - Electricity

01

L

H01L 39/02 (2006.01) C30B 29/16 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2121315

Abstract of the Disclosure: A method for depositing a thin film of a material on an oxide thin film having a perovskite type crystal structure formed on a substrate comprising steps of depositing a seed layer of a single crystal of the material having an extremely thin thickness at a relatively high substrate temperature on the oxide thin film having a perovskite type crystal structure and depositing a thin film of the material on the seed layer at a lower substrate temperature.

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