Method for developing photoresist layer on a video disc master

G - Physics – 03 – F

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96/264

G03F 7/00 (2006.01)

Patent

CA 1165613

METHOD FOR FORMING VIDEO DISCS ABSTRACT OF THE DISCLOSURE Methods for use in producing a disc-shaped recording master having a thin photoresist recording layer for storing an f.m. information signal with high density. During recording, an intensity-modulated writing beam is focused onto the photoresist layer, to form a succession of spaced exposed regions arranged in a plurality of substantially cir- cular and concentric recording tracks. The master further includes a glass substrate having a specially prepared surface, and the photoresist layer is deposited on the surface using a technique that ensures a uniform thickness and a uniform sensitivity to the writing beam. The peak intensity of the writing beam is selectively adjusted such that the succession of spaced exposed regions is formed with an optimum 50/50 duty cycle. After development to remove the spaced exposed regions, the recording master is used to produce a metallic stamper that, in turn, is used to produce disc replicas. Developing is effected by first dispensing water on the photoresist layer to pre-wet it, then both water and developer solution are dispensed and finally developer solution alone.

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