Method for etching layers deposited on transparent...

C - Chemistry – Metallurgy – 25 – F

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C25F 3/14 (2006.01) H01J 9/02 (2006.01)

Patent

CA 2437886

The invention concerns a method for electrochemical etching of a layer (11) with electrically conductive properties, of doped metal oxide type, on a glass-type transparent substrate (10) provided with a mask to be removed after etching, and the method which consists in: contacting at least a zone of the layer to be etched (13) with an electrically conductive solution (20), immersing in the solution (20) an electrode (30) and arranging it opposite and at a distance (d) from the zone (13), applying an electric voltage (U) between the electrode (30) and the layer (11) to be etched. The invention is characterised in that the electrode has an elongated shape such that the etching is carried out on several zones of the layer over a width (l) of the substrate.

Procédé de gravure électrochimique d'une couche (11) à propriétés de conduction électrique, de type oxyde métallique dopé, sur un substrat transparent (10) de type verrier muni d'un masque apte à être ôté après gravure, et le procédé consistant à: mettre en contact au moins une zone (13) à graver de la couche avec une solution électriquement conductrice (20), immerger dans la solution (20) une électrode (30) et à la disposer en regard et à une distance (d) de la zone (13), appliquer une tension électrique (U) entre l'électrode (30) et la couche (11) à graver, caractérisé en ce que l'électrode présente une forme oblongue de sorte que la gravure est effectuée sur plusieurs zones de la couche selon une largeur (l) du substrat.

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