Method for fabricating self-assembling microstructures

H - Electricity – 01 – L

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Details

H01L 21/70 (2006.01) H01L 21/58 (2006.01) H01L 21/68 (2006.01) H01L 21/98 (2006.01) H01L 23/13 (2006.01) H01L 23/14 (2006.01) H01L 25/04 (2006.01) H01L 25/065 (2006.01) H01L 29/06 (2006.01) H01L 31/04 (2006.01) H01L 31/042 (2006.01) H01S 5/022 (2006.01) H01S 5/40 (2006.01)

Patent

CA 2177276

A method for assembling onto a substrate through fluid transport. The microstructures being shaped blocks (19) self-align into recessed regions (55) located on a substrate (50) such that the microstructure becomes integral with the substrate. The improved method includes a step of transferring the shaped blocks into a fluid to create a slurry. Such slurry is then ppoured evenly over the top surface (53) of a substrate having recessed regions thereon. The microstructure via the shape and fluid tumbles onto the surface of the substrate, self-aligns, and engages into a recessed region.

Procédé d'assemblage de microstructures sur un substrat par transport de fluide. Les microstructures selon l'invention étant des blocs (19) de forme définie, ils s'alignent automatiquement dans les régions en retrait (55) situées sur un substrat (50) de manière à former partie intégrante de ce dernier. Le procédé amélioré selon l'invention consiste à transférer les blocs de forme définie dans un fluide de manière à former une boue qui est ensuite versée régulièrement sur la surface supérieure (53) d'un substrat présentant des évidements. La microstructure coule, grâce à la forme et au fluide, sur la surface du substrat, s'aligne automatiquement et pénètre dans la région en retrait.

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