Method for fabrication of discrete dynode electron multipliers

Details Method for fabrication of discrete dynode electron multipliers Method for fabrication of discrete dynode electron multipliers

H - Electricity

01

J

H01J 9/02 (2006.01) H01J 9/12 (2006.01) H01J 43/18 (2006.01)

Patent

CA 2229731

A method for manufacturing a discrete dynode electron multiplier includes employing micromachining and thin film techniques to produce tapered apertures in an etchable substrate, bonding the substrates together and activating the internal surfaces of the etched substrate using chemical vapor deposition or oxidizing and nitriding techniques.

Procédé de fabrication de multiplicateurs d'électrons à dynodes discrètes consistant à utiliser des techniques de micro-usinage et de traitement en film mince pour produire des ouvertures coniques dans un substrat gravable, à coller les substrats ensemble et à activer les faces internes du substrat gravé en recourant à des techniques de déposition en phase vapeur, d'oxydation ou de nitruration.

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