Method for fabrication of patterned carbon nanotube films

Details Method for fabrication of patterned carbon nanotube films Method for fabrication of patterned carbon nanotube films

C - Chemistry, Metallurgy

23

C

C23C 16/02 (2006.01) C01B 31/02 (2006.01) C23C 16/26 (2006.01) H01J 9/02 (2006.01)

Patent

CA 2315132

A method for fabricating adherent, patterned carbon nanotube films is provided. According to the invention, a substrate is patterned with a carbide-forming material, a carbon-dissolving material, or a low melting point metal. Carbon nanotubes are then deposited onto the patterned substrate, but have relatively poor adhesion to either the substrate material or the patterned material. The substrate is then annealed, typically in vacuum, at a temperature dependent on the particular patterning material, e.g., a temperature at which carbide formation occurs, at which carbon dissolution occurs, or at which the low melting point metal melts. The annealing thereby provides an adherent nanotube film over the patterned areas, while the nanotubes deposited onto the non-patterned areas are easily removed, e.g., by blowing, rubbing, brushing and/or ultrasonication in a solvent such as methanol.

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