Method for fabrication of wavelength selective electro-optic...

H - Electricity – 01 – S

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H01S 5/125 (2006.01) H01S 5/12 (2006.01) H01S 5/042 (2006.01) H01S 5/0625 (2006.01) H01S 5/10 (2006.01) H01S 3/18 (1990.01)

Patent

CA 2136254

A method is described for the preparation of a DFB/DBR laser which includes an electro-optic grating formed by periodically modulating the index of refraction of the cladding employed. The method involves depositing a waveguide upon a semi-insulating or doped substrate and then depositing an active layer upon the resultant structure. The active layer is subsequently selectively etched and a cladding material deposited adjacent thereto and electrically isolated therefrom. The cladding is then selectively patterned with a conductive material by photolithographic techniques to yield a grating to periodically modulate the index of refraction.

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