Method for improving the crystallinity of semiconductor...

Details Method for improving the crystallinity of semiconductor... Method for improving the crystallinity of semiconductor...

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H01L 21/26 (2006.01) C23C 16/22 (2006.01) C23C 26/02 (2006.01) C30B 1/02 (2006.01) H01L 21/268 (2006.01) H01L 31/068 (2006.01) H01L 31/07 (2006.01) H01L 31/18 (2006.01)

Patent

CA 1066432

METHOD FOR IMPROVING THE CRYSTALLINITY OF SEMICONDUCTOR FILMS BY LASER BEAM SCANNING ABSTRACT OF THE DISCLOSURE A method is disclosed for improving the crystallinity of semiconductor films by scanning the surface of such films with a shaped, focused laser beam. The laser is matched to the film so that the beam delivers sufficient energy thereto to heat the film above a temperature at which crystallization occurs along the scan track.

267501

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