G - Physics – 02 – B
Patent
G - Physics
02
B
88/113, 26/197,
G02B 6/12 (2006.01) G02B 5/08 (2006.01) H01S 5/028 (2006.01) H01S 5/16 (2006.01) H01S 5/22 (2006.01) H01S 5/02 (2006.01)
Patent
CA 2017303
A method, and devices produced therewith, for improving the flatness of etched mirror facets of integrated optic structures with non-planar stripe waveguides such as ridge or groove diode lasers or passive devices like modulators and switches. The curvature in the mirror facet surface, occurring at the edges of the waveguide due to topographical, lithographical and etch process effects, that causes detrimental phase distortions, is avoided by widening the waveguide end near the mirror surface thereby shifting the curved facet regions away from the light mode region to surface regions where curvature is not critical.
Buchmann Peter Leo
Vettiger Peter
Voegeli Otto
Webb David John
Barrett B.p.
International Business Machines Corporation
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