Method for lowering dark conductivity of thin semiconducting...

Details Method for lowering dark conductivity of thin semiconducting... Method for lowering dark conductivity of thin semiconducting...

H - Electricity

01

L

204/80.5

H01L 21/00 (2006.01) H01L 21/388 (2006.01) H01L 21/465 (2006.01) H01L 21/479 (2006.01) H01L 31/18 (2006.01)

Patent

CA 893823

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