H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/107
H01L 37/00 (2006.01) H01C 7/04 (2006.01)
Patent
CA 1143865
TITLE OF THE INVENTION "METHOD FOR MAKING A CARBIDE THIN FILM THERMISTOR" ABSTRACT OF THE DISCLOSURE A method for making a carbide thin film thermistor which comprises providing an insulating substrate, forming at least one pair of electroconductive electrodes on the substrate in a desired pattern, and forming a carbide re- sistor film on the insulating substrate and the electro- conductive electrodes by a sputtering while leaving part of the electrodes to be exposed for external connections. A carbide target material is sputtered in an inert gas atmosphere containing a small amount of an impurity gas. The thermistor element is arbitrarily controlled to have a desired level of resistance by choice of the impurity gas, the amount of such gas and the mode of sputtering. Optionally, the element is trimmed to adjust its resistance accurately and is also hermetically sealed within a glass tube to prevent the element from being contaminated with harmful substances.
362125
Kobayashi Ikuo
Nagai Takeshi
Yamamoto Kazushi
Matsushita Electric Industrial Co. Ltd.
Robic Robic & Associes/associates
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