Method for making a planar waveguide

Details Method for making a planar waveguide Method for making a planar waveguide

G - Physics

02

B

G02B 6/13 (2006.01) G02B 6/122 (2006.01) G02B 6/136 (2006.01) G02B 6/28 (2006.01) H04B 10/12 (2006.01) H01S 3/063 (2006.01)

Patent

CA 2352919

The present invention is a method for making planar waveguides. The method comprises the steps of providing a workpiece comprising a layer of material suitable for the waveguide strip; patterning the layer so that the workpiece comprises a base portion and the at least one protruding portion; farming a cladding layer on the protruding portion; and attaching the cladding layer to a substrate. Depending on the composition of the workpiece, the process may further require removing the base portion to expose the bottom surface of the protruding portion. With this method, a planar waveguide or a planar waveguide amplifier may be fabricated having thickness dimensions greater than 5 µm, or more preferably, in the range of 10-20 µm.

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