Method for making a tantala-silica interference filter on...

Details Method for making a tantala-silica interference filter on... Method for making a tantala-silica interference filter on...

C - Chemistry, Metallurgy

23

C

C23C 16/06 (2006.01) C23C 16/44 (2006.01) G02B 5/28 (2006.01) H01J 9/20 (2006.01) H01K 1/32 (2006.01)

Patent

CA 2186540

A method for making a tantala/silica interference filter on the surface of a tungsten-halogen incandescent lamp having molybdenum leads includes depositing on the lamp surface by low pressure chemical vapor deposition the interference filter comprising alternating layers of tantala and silica. Thereafter, the filter is heat treated in an atmosphere of humidified inert gas containing less than 1% oxygen.

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