C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 16/26 (2006.01) G03F 1/00 (2006.01)
Patent
CA 2408959
The invention concerns a method for making an extreme ultraviolet microlithography transmission modulator, characterised in that it consists in obtaining adamantine amorphous carbon by a process using a plasma consisting of a mixture of acetylene and argon and maintained by the power of a microwave source; in depositing a thin adamantine amorphous carbon film on a substrate with low absorption in extreme ultraviolet whereto is applied a variable polarisation; in varying the forbidden band between 1 and 2 eV through control of the argon partial pressure and in varying the corresponding extinction coefficient so as to modulate the modulator transmission without modifying the thickness of the deposited film.
Procédé de fabrication d'un modulateur de transmission pour microlithographie en ultraviolet profond, caractérisé en ce qu'il consiste à obtenir du carbone amorphe adamantin par un procédé mettant en oeuvre un plasma composé d'un mélange d'acétylène et d'argon et entretenu par la puissance d'une source de micro-ondes, à déposer un film mince en carbone amorphe adamantin sur un substrat faiblement absorbant dans l'ultraviolet profond auquel est appliquée une polarisation variable, à faire varier la bande interdite entre 1 et 2 eV par le contrôle de la pression partielle d'argon et à faire ainsi varier le coefficient d'extinction correspondant afin de moduler la transmission du modulateur sans modifier l'épaisseur du film déposé.
Arnal Yves Alban Marie
Golanski Andre
Lacoste Ana
Pelletier Jacques Henri Lucien
Piazza Fabrice
Centre National de La Recherche Scientifique (c.n.r.s.)
Robic
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