H - Electricity – 01 – L
Patent
H - Electricity
01
L
343/23, 148/3.1
H01L 45/00 (2006.01) C23C 14/00 (2006.01) C23C 14/06 (2006.01) C23C 14/32 (2006.01) C23C 16/22 (2006.01) H01L 25/04 (2006.01) H01L 29/16 (2006.01) H01L 31/0376 (2006.01) H01L 31/07 (2006.01) H01L 31/075 (2006.01) H01L 31/20 (2006.01) C23C 16/44 (2006.01)
Patent
CA 1192816
ABSTRACT The production of improved germanium photo- responsive amorphous alloys (118, 146, 168, 180, 194, 206, 208, 210, 214, 216, 218, 220) and de- vices, such as photovoltaic (142, 168, 198, 212) photoreceptive devices (178, 192) and the like is made possible by adding at least one density of states reducing or altering element, fluorine, to the alloys (118, 146, 168, 180, 194, 206, 208, 210, 214, 216, 218, 220). The altering element or elements are added to the germanium amorphous alloys (118, 146, 168, 180, 194, 206, 208, 210, 214, 216, 218, 220) either during or after the deposition thereof. Band gap adjusting element(s) can also be added. One adjusting element is car- bon which increases the band gap from that of the materials without the adjusting element incorpo- rated therein. Other adjusting elements can be used such as nitrogen. The germanium and adjust- ing elements are concurrently combined and de- posited as amorphous alloys (118, 146, 168, 180, 194, 206, 208, 210, 214, 216, 218, 220) by vapor deposition, sputtering or glow discharge decompo- sition. The addition of fluorine bonding and electronegativity to the alloy (118, 146, 168, 180, 194, 206, 208, 210, 214, 216, 218, 220) acts as a compensating or altering element to reduce the density of states in the energy gap thereof. The fluorine bond strength allows the adjusting element(s) to be added to the alloy (118, 146, 168, 180, 194, 206, 208, 210, 214, 216, 218, 220) to adjust the band gap without reducing the elec- tronic qualities of the alloy (118, 146, 168, 180, 194, 206, 208, 210, 214, 216, 218, 220). Hydrogen also acts as a compensating or altering element to complement fluorine when utilized therewith. The addition of the adjusting element(s) to the alloys (118, 146, 168, 180, 194, 206, 208, 210, 214, 216, 218, 220) adjusts the band gap to a selected opti- mum wavelength threshold for a particular device (142, 168, 198, 212, 178, 192) to increase the photoabsorption efficiency to enhance the device's photoresponsiveness without adding states in the gap which decrease the efficiency of the devices (142, 168, 198, 212, 178, 192). The adjusting element(s) can be added in varying amounts, in discrete layers or in substantially constant amounts in the alloys (118, 146, 168, 180, 194, 206, 208, 210, 214, 216, 218, 220) and devices (142, 168, 198, 212, 178, 192).
385385
Cannella Vincent
Izu Masatsugu
Ovshinsky Stanford R.
Energy Conversion Devices Inc.
Macrae & Co.
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