C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
C30B 29/60 (2006.01) C30B 11/00 (2006.01) C30B 13/00 (2006.01)
Patent
CA 2176606
The present invention relates to a method for forming crystal substrates on which can be easily formed spherical crystals which have superior crystal structure and little defect in shape. The present invention also relates to a method for making crystal substrates on which can be easily formed spherical crystals which have little defect in shape and from which impurities have been removed. Projections are formed integrally from a semiconductor crystal base, and flow regulating film is formed to cover the entire outer surface of the crystal base and a base portion of the projections. A heating beam is applied to the tips of the projections, and the end portions of the projections are melted. The surface tension of the melt and the melt regulation by the flow regulating film act to solidify the melt in a spherical shape, thus forming a spherical crystal.
L'invention concerne un procédé permettant de produire un cristalde support, selon lequel des cristaux sphériques non déformés présentant une très bonne structure cristalline peuvent être facilement formés sur un matériau cristallin de base, ou bien un procédépermettant de produire un cristal de support, selon lequel des cristaux sphériques non déformés, exempts d'impuretés, peuvent êtrerapidement formés sur un matériau cristallin de base. Le procédé consiste à former des saillies faisant partie intégrante d'un matériau de base cristallin semi-conducteur, à former un film de régulation de flux qui recouvre la surface du matériau de base et toute la partie extérieure de la partie inférieure de chaque saillie, à exposer la pointe de chaque saillie à un rayonnement chaud pour la faire fondre, et à faire solidifier la pointe fondue en une forme sphérique sous l'effet de la tension superficielle de la pointe en fusion elle-même et de l'action de régulation de flux du film.
Adams Patent & Trademark Agency
Nakata Josuke
LandOfFree
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