H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/140
H01L 21/465 (2006.01) H01L 21/033 (2006.01) H01L 21/329 (2006.01) H01L 29/872 (2006.01)
Patent
CA 1148274
Method for Making Stable Nitride-Defined Schottky Barrier Diodes Abstract Excessive leakage after initial forward stress, exhibited by subsequently reverse stressed nitride defined, Schottky barrier diodes is solved by the elimination of the "mouse hole" or undercut cavity in the oxide layer beneath the nitride ring defining the Schottky contact to the underlying silicon. The aforementioned cavity is filled by depositing chemical vapor deposited (CVD) oxide onto the nitride layer, into the nitride ring and the undercut oxide cavity beneath the ring and onto the underlying silicon substrate exposed through the nitride ring. The CVD oxide is then reactively ion etched to remove it except along the vertical walls of the nitride ring and the oxide cavity. The Schottky metal is deposited on the silicon substrate exposed by the reactive ion etching step. FI 9-79-061
368426
Anantha Narasipur G.
Bhatia Harsaran S.
International Business Machines Corporation
Saunders Raymond H.
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