Method for manufacturing an array of microelectrodes

Details Method for manufacturing an array of microelectrodes Method for manufacturing an array of microelectrodes

G - Physics

01

N

G01N 27/333 (2006.01) G01N 27/30 (2006.01) G01N 27/403 (2006.01) H01L 21/3205 (2006.01)

Patent

CA 2173932

The method for manufacturing an array of microelectrodes on an electrically insulated top surface of a substrate comprises the following sequence of steps. A thin layer of a metal or metal alloy is deposited by laser ablation onto the top surface of the substrate and through openings of a mask provided on this top surface. The array of microelectrodes is then revealed by removing the mask from the top surface. Advantageously, the method according to the present invention allows to manufacture microelectrodes made of any metal even inert metals and metal alloys and disposed in a precise design.

La méthode pour fabriquer un groupement de micro-électrodes sur la surface supérieure électriquement isolée d'un support comprend les étapes suivantes. Une mince couche de métal ou d'un alliage de métaux est déposée par ablation laser sur la surface supérieure du support et à travers les ouvertures d'un masque placé sur cette surface supérieure. Le groupement de micro-électrodes est ensuite révélé par l'enlèvement du masque de la surface supérieure. Avantageusement, la méthode conçue dans la présente invention permet de fabriquer des micro-électrodes à partir de tout métal, y compris un métal inerte ou un alliage, et disposées selon une géométrie précise.

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