Method for manufacturing complex grating masks having phase...

Details Method for manufacturing complex grating masks having phase... Method for manufacturing complex grating masks having phase...

G - Physics

03

F

G03F 1/26 (2012.01) G02B 5/18 (2006.01)

Patent

CA 2428288

A method for manufacturing complex gratings masks having phase shifted regions and a holographic set-up for making the same are disclosed. The method, which can be easily automated, allows to produce arbitrary phase shift in holographically recorded gratings with high precision. In a preferred embodiment, the phase is controlled by a fringe locking system with a movable locking detector and a phase measuring device such as a camera for example, thereby allowing to provide a real-time phase locking and a real-time calibration of the set-up.

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