Method for manufacturing film thermopile

H - Electricity – 01 – L

Patent

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356/99

H01L 35/34 (2006.01)

Patent

CA 1037614

ABSTRACT OF THE DISCLOSURE Disclosure is made of a method for manufacturing a film thermopile, whereby a film of thermoelectric semiconductor material which is n-type stoichiometric solid solution contain- ing Bi2Te3 and Sb2Te3 is deposited on a substrate. Then zone refinement is effected so that the adjacent arms of the thermo- electric battery are at different temperatures, some at a tem- perature of not above 300°C, and others at a temperature of not less then 350°C.

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